FABMOVER — Cleanroom AMR for
Semiconductor Pod & Cassette Handling
SEMI E82/E84 compliant. KUKA LBR iiwa / iisy. Built for existing fab layouts.
Industry > Fab Automation
A Robotic Semiconductor Material Handling Platform
FABMOVER is a configurable robotic semiconductor material handling platform for transport, logistics, machine interaction and automated handling of reticles, FOUPs and cassettes. The system combines mobile robotics, interfaces to fab software systems and application-specific automation components to support material flow processes in semiconductor manufacturing environments.
Material Handling Applications
FABMOVER supports a wide range of semiconductor
material handling applications, from automated transport tasks to complete material
flow automation. Typical applications include:
Pod transport
Reticle
handling
Carrier logistics
Tool-to-tool transport
FOUP handling
Cassette
handling
Stocker integration
Engineering lot handling
Automated loading and unloading
Depending on the application, FABMOVER can automate individual transport tasks, machine interaction and complete material handling workflows involving buffers, stockers and production equipment.
Configurable FABMOVER Solutions
Automation requirements vary significantly between semiconductor manufacturing environments. For this reason, FABMOVER is available in multiple configurations and can be adapted to suitable mobile robot and mobile manipulation platforms.
FABMOVER KMR iisy
Compact mobile manipulation platform for pod transport, carrier logistics and handling applications.
FABMOVER KMR iiwa
7-axis mobile robot system for advanced handling applications requiring additional reach and flexibility.
FABMOVER Shuttle
Compact carrier transport solution for material logistics and transport workflows.
FABMOVER Pod Opener
Automated pod opening and closing solution for various pod and clip types. Available as a standalone station or integrated directly into FABMOVER workflows.
Software and Workflow Integration
Semiconductor automation requires more than vehicle control and transport management. BEC software coordinates transport jobs, workflow execution, buffer management and communication between vehicles, machines and production systems. The software manages manufacturing and transport workflows, fleet coordination, diagnostics and integration into customer-specific MES, ERP and production environments. Because every fab operates differently, interfaces, communication protocols and workflow logic can be adapted to project-specific requirements.
Advanced Automation Components
FABMOVER can be extended with additional hardware and software components to support customer-specific automation requirements. Available options include:
RFID-enabled buffer systems, Smart Pod Bases, Camera-assisted handling systems, Application-specific grippers, Automated pod opening solutions.
These components support reliable carrier identification, positioning, tracking and handling while enabling automation of process steps that are often performed manually.
Brownfield and Greenfield Automation
FABMOVER supports both brownfield and greenfield automation projects. Existing machines, limited space, manual process steps and proprietary software interfaces often create integration challenges that cannot be solved through transport systems alone. FABMOVER combines mobile robotics, software integration and configurable automation components to automate existing workflows while minimizing modifications to customer equipment and production processes.
Monitoring and Diagnostics
BEC's web-based monitoring system provides real-time visibility of vehicle status, carrier information and active transport jobs. Operators and engineers can monitor transport operations, analyze system performance and support troubleshooting from desktop systems, tablets and mobile devices. Additional simulation and replay functions support commissioning, troubleshooting, optimization and long-term operation of semiconductor automation systems.
Integration and Standards
FABMOVER supports semiconductor-standard
communication interfaces including:
SEMI E82
SEMI E84
The platform can also be integrated with customer-specific machine interfaces, communication protocols and software environments. FABMOVER is designed to support different mobile robot and automation technologies while maintaining a consistent software and integration architecture.
Projects
Selected projects demonstrating heavy payload mobile robotics in real industrial production and intralogistics environments.
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Industrial Automation
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The Mobile Robot Platform: a decoupled system that moves an industrial robot between docking stations. It combines AGV flexibility with stationary-robot precision at payloads up to 300 kg.
Mobile Manipulators
KUKA KMR series: mobile manipulators that put a robot arm on an autonomous mobile base. Available in payload classes from 7 kg up to 300 kg.
Frequently Asked Questions
Answers to common questions about our robotics systems, integration process, and project capabilities.
FABMOVER is BEC Robotics' cleanroom AMR system, designed specifically for semiconductor manufacturing fabs. Based on KUKA's KMR iisy or iiwa platform, FABMOVER automates pod transport, cassette handling, and pod opening/closing — reducing manual handling, minimising contamination, and increasing production efficiency.
FABMOVER reduces the need for manual handling during routine pod and cassette transport tasks. Manual handling is a primary source of contamination and handling errors in cleanrooms. By automating these movements, FABMOVER ensures consistent, contamination-free material transfer between tools, load ports, and storage locations.
FABMOVER automates pod transport between equipment and storage, cassette handling between load ports and tools, pod opening and closing operations, and transport between fab zones. It supports the repetitive, high-precision material movements required in high-volume wafer production environments.
FABMOVER is engineered for operation in demanding cleanroom environments. The platform, materials, and drive systems are selected and validated to minimise particle generation, making it suitable for semiconductor cleanrooms including ISO Class 3–5 fabs.
OHT systems use dedicated overhead infrastructure, while FABMOVER operates on the factory floor and can be integrated with minimal structural modifications. This makes FABMOVER well suited for brownfield upgrades, areas where OHT is not feasible, and transport between OHT transfer stations and process equipment.
Yes. FABMOVER supports integration with semiconductor equipment and fab automation systems using industry-standard SEMI communication interfaces, including SEMI E82 for intrabay transport and SEMI E84 for load port communication.
FABMOVER integrates with customer MES and fab automation systems using standard industrial communication interfaces. Depending on the application, BEC adapts the communication and data exchange to ensure seamless integration into existing production workflows.
Yes. FABMOVER supports phased deployment — starting with a single system for high-priority transport tasks and expanding as production requirements grow. Additional systems can be integrated step by step, enabling automation to evolve alongside production needs.
Contact Form
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